A Brief History of Gratings and the Making of the MIT Nanoruler
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چکیده
MIT Makes the World’s Most Precise Ruler A team of MIT students, scientists and engineers has developed the world’s fastest and most precise tool for patterning large gratings. This new tool, called the Nanoruler, is capable of fabricating gratings 10-1000 times faster and more precisely than previous methods. This revolutionary technology will enable breakthroughs in many areas including semiconductor manufacturing, advanced lithography, metrology, nanotechnology, diffractive optics, space physics, fusion energy research, magnetic storage and flat panel displays. The Nanoruler continues a line of research in advanced grating fabrication technology initiated at MIT in the late 1940’s by Prof. George R. Harrison, placing MIT once again at the forefront of grating fabrication technology.
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